A run-to-run controller for product surface quality improvement
نویسندگان
چکیده
منابع مشابه
Nonlinear Run-to-Run Controller for Semiconductor Manufacturing
Run-to-run control is a generic methodology in control of semiconductor manufacturing processes. It is a model based process control strategy whereby process inputs (recipes) are adjusted on a run-to-run basis in response to measurements (responses) of process state variables. It updates the recipes of the process at the beginning of each run. In semiconductor manufacturing, many processes are ...
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Future Work The development of VLSI raised the requirement of process control for semiconductor manufacturing. On the other hand, the knowledge of different processes is very limited. Run-by-Run control is an effective way to regulate the process response under different kinds of disturbances such as small drifting, abrupt shifting, bad-data and model errors. There are several popular methods f...
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In order to successfully apply Run-to-Run (RtR) control or real time control in a semiconductor process, it is very important to estimate the process model. Traditional semiconductor process control methods neglect the importance of robustness due to the estimation methods they use. A new approach, namely the set-valued RtR controller with ellipsoid approximation, is proposed to estimate the pr...
متن کاملStability Analysis of EWMA Run-to-Run Controller Subjects to Stochastic Metrology Delay
In the semiconductor manufacturing batch processes, each step is a complicated physicochemical batch process; generally it is difficult to perform measurements on-line. The effect of the metrology delay on the stability of the system is an important issue needs to be understood. This paper investigates the stability of systems under exponentially weighted moving average (EWMA) runto-run control...
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Semiconductor manufacturing industry has elevated cost in productions. Improvement of production efficiency is always an important goal for manufacturers. Run-to-run control has been widely used in batch manufacturing processes to reduce variations. Threaded exponentially weighted moving average (threaded-EWMA) run-to-run control is an important and stable control scheme. In this paper, we stud...
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ژورنال
عنوان ژورنال: International Journal of Production Research
سال: 2013
ISSN: 0020-7543,1366-588X
DOI: 10.1080/00207543.2013.865854